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Chapter 3 Coatings and surface modification using low pressure non-equilibrium plasmas
Harold F. Winters, Robert P.H. Chang, C.J. Mogab, John Evans, John A. Thornton, Hirotsugu YasudaVolume:
70
Year:
1985
Language:
english
Pages:
25
DOI:
10.1016/0025-5416(85)90268-x
File:
PDF, 2.33 MB
english, 1985