A novel MEMS omnidirectional inertial switch with flexible...

Sensors and Actuators A: Physical 2014 / 06 Vol. 212

A novel MEMS omnidirectional inertial switch with flexible electrodes

Zhanwen, Xi, Ping, Zhang, Weirong, Nie, Liqun, Du, Yun, Cao
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Volume:
212
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2014.02.035
Date:
June, 2014
File:
PDF, 4.07 MB
english, 2014
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