Study of plasma immersion ion implantation inside a...

Surface and Coatings Technology 2014 / 06 Vol. 249

Study of plasma immersion ion implantation inside a conducting tube using an E×B field configuration

Pillaca, Elver Juan de Dios Mitma, Ueda, Mario, Mariano, Samantha de Fátima Magalhães, de Moraes Oliveira, Rogerio
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Volume:
249
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2014.03.042
Date:
June, 2014
File:
PDF, 565 KB
english, 2014
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