Shielded piezoresistive cantilever probes for nanoscale...

Shielded piezoresistive cantilever probes for nanoscale topography and electrical imaging

Yang, Yongliang, Ma, Eric Yue, Cui, Yong-Tao, Haemmerli, Alexandre, Lai, Keji, Kundhikanjana, Worasom, Harjee, Nahid, Pruitt, Beth L, Kelly, Michael, Shen, Zhi-Xun
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Volume:
24
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/24/4/045026
Date:
April, 2014
File:
PDF, 1.45 MB
english, 2014
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