Shielded piezoresistive cantilever probes for nanoscale topography and electrical imaging
Yang, Yongliang, Ma, Eric Yue, Cui, Yong-Tao, Haemmerli, Alexandre, Lai, Keji, Kundhikanjana, Worasom, Harjee, Nahid, Pruitt, Beth L, Kelly, Michael, Shen, Zhi-XunVolume:
24
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/24/4/045026
Date:
April, 2014
File:
PDF, 1.45 MB
english, 2014