Structural characterization of amorphous materials applied to low-k organosilicate materials
Raymunt, Alexandra Cooper, Clancy, PauletteVolume:
562
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2014.03.040
Date:
July, 2014
File:
PDF, 1.36 MB
english, 2014