Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2001 Vol. 19; Iss. 3
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Microwave-assisted chemical vapor deposition process for synthesizing carbon nanotubes
Kuo, Teng-Fan, Juang, Zhen-Yu, Tsai, Chuen-Horng, Tsau, You-Ming, Cheng, Hsiu-Fung, Lin, I-NanVolume:
19
Year:
2001
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.1352722
File:
PDF, 468 KB
english, 2001