![](/img/cover-not-exists.png)
Dimensional considerations in achieving large quality factors for resonant silicon cantilevers in air
Naeli, Kianoush, Brand, OliverVolume:
105
Year:
2009
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3062204
File:
PDF, 841 KB
english, 2009