Crystalline SiC thin films deposited at room temperature using pulsed laser ablation of graphite and magnetron sputtering of silicon
Nainaparampil, Josekutty J., Zabinski, Jeffrey S.Volume:
17
Year:
1999
Language:
english
DOI:
10.1116/1.581663
File:
PDF, 913 KB
english, 1999