Characteristics of Ga-doped ZnO films deposited by pulsed DC magnetron sputtering at low temperature
Ahn, Kyung-Jun, Lee, Sanghun, Kim, Won-Jeong, Yeom, Geun Young, Lee, WoongVolume:
16
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2013.07.026
Date:
December, 2013
File:
PDF, 2.64 MB
english, 2013