Characterization of zinc–tin–oxide films deposited by radio...

Characterization of zinc–tin–oxide films deposited by radio frequency magnetron sputtering at various substrate temperatures

Lee, Ik-Jae, Sung, Nark-Eon, Chae, Keun Hwa, Conley, Ray
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Volume:
548
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.08.067
Date:
December, 2013
File:
PDF, 750 KB
english, 2013
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