Pd ohmic contacts to p-SiC 4H, 6H and 15R polytypes

Diamond and Related Materials 1999 / 6 Vol. 8; Iss. 6

Pd ohmic contacts to p-SiC 4H, 6H and 15R polytypes

Kalinina, E.V., Kholuyanov, G.F., Shchukarev, A.V., Savkina, N.S., Babanin, A.I., Yagovkina, M.A., Kuznetsov, N.I.
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Volume:
8
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/s0925-9635(99)00007-2
Date:
June, 1999
File:
PDF, 118 KB
english, 1999
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