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SPIE Proceedings [SPIE 2012 International Workshop on Information Data Storage and Ninth International Symposium on Optical Storage - Shanghai, China (Sunday 21 October 2012)] 2012 International Workshop on Information Storage and Ninth International Symposium on Optical Storage - Optical emission spectroscopy analysis for Ge 2 Sb 2 Te 5 etching endpoint detection in HBr/He plasma
Li, Juntao, Liu, Bo, Song, Zhitang, Feng, Gaoming, Wu, Guanping, He, Aodong, Yang, Zuoya, Zhu, Nanfei, Xu, Jia, Ren, Jiadong, Feng, Songlin, Gan, Fuxi, Song, ZhitangVolume:
8782
Year:
2013
Language:
english
DOI:
10.1117/12.2018658
File:
PDF, 769 KB
english, 2013