[IEEE 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS) - Sorrento, Italy (2009.01.25-2009.01.29)] 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems - Nanotexture Electrode on Nanoporous AAO Dielectric for Micro Tactile Sensing Devices
Hong, Chi-Tsung, Chu, Li-An, Chiang, Ann-Shyn, Fang, WeileunYear:
2009
Language:
english
DOI:
10.1109/memsys.2009.4805329
File:
PDF, 4.46 MB
english, 2009