Calculation of gas heating in a dc sputter magnetron

Calculation of gas heating in a dc sputter magnetron

Kolev, I., Bogaerts, A.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
104
Year:
2008
Language:
english
DOI:
10.1063/1.2970166
File:
PDF, 986 KB
english, 2008
Conversion to is in progress
Conversion to is failed