Power supply with arc handling for high peak power...

Power supply with arc handling for high peak power magnetron sputtering

Christie, D. J., Tomasel, F., Sproul, W. D., Carter, D. C.
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Volume:
22
Year:
2004
Language:
english
DOI:
10.1116/1.1688365
File:
PDF, 276 KB
english, 2004
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