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The properties of fluorine containing diamond-like carbon films prepared by plasma-enhanced chemical vapour deposition
Bendavid, A., Martin, P.J., Randeniya, L., Amin, M.S.Volume:
18
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2008.09.021
Date:
January, 2009
File:
PDF, 614 KB
english, 2009