Simulation of Reactive Distillation Process for Monosilane Production via Redistribution of Trichlorosilane
Shuaishuai, Sun, Guoqiang, HuangVolume:
22
Language:
english
Journal:
Chinese Journal of Chemical Engineering
DOI:
10.1016/s1004-9541(14)60045-8
Date:
March, 2014
File:
PDF, 261 KB
english, 2014