Control of wet-etching thickness in the vertical cavity...

Control of wet-etching thickness in the vertical cavity surface emitting laser structure by in situ laser reflectometry

Cho, H. K., Lee, J. Y., Lee, B., Baek, J. H., Han, W. S.
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Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.591036
File:
PDF, 427 KB
english, 1999
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