Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1999 Vol. 17; Iss. 6
Control of wet-etching thickness in the vertical cavity surface emitting laser structure by in situ laser reflectometry
Cho, H. K., Lee, J. Y., Lee, B., Baek, J. H., Han, W. S.Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.591036
File:
PDF, 427 KB
english, 1999