Deposition of a TMDSO-Based Film by a Non-Equilibrium...

Plasma Processes and Polymers 2013 / 07 Vol. 10; Iss. 7

Deposition of a TMDSO-Based Film by a Non-Equilibrium Atmospheric Pressure DC Plasma Jet

Deng, Xiaolong, Nikiforov, Anton Yu, De Geyter, Nathalie, Morent, Rino, Leys, Christophe
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Volume:
10
Language:
english
Journal:
Plasma Processes and Polymers
DOI:
10.1002/ppap.201200166
Date:
July, 2013
File:
PDF, 400 KB
english, 2013
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