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An atmospheric pressure inductively coupled microplasma source of vacuum ultraviolet light
Sato, Ryoto, Yasumatsu, Daisuke, Kumagai, Shinya, Takeda, Keigo, Hori, Masaru, Sasaki, MinoruVolume:
215
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2013.09.018
Date:
August, 2014
File:
PDF, 1.98 MB
english, 2014