Fabrication of nanoscale patterns in lithium fluoride crystal using a 13.5 nm Schwarzschild objective and a laser produced plasma source
Wang, Xin, Mu, Baozhong, Jiang, Li, Zhu, Jingtao, Yi, Shengzhen, Wang, Zhanshan, He, PengfeiVolume:
82
Year:
2011
Language:
english
DOI:
10.1063/1.3665970
File:
PDF, 836 KB
english, 2011