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Structural distortion and the effect of bake-before-development in a negative photoresist process
Rajesh Mehta, D.N. Singh, M.J. ZarabiVolume:
20
Year:
1989
Language:
english
Pages:
7
DOI:
10.1016/0026-2692(89)90005-0
File:
PDF, 565 KB
english, 1989