[IEEE 2013 IEEE 8th Nanotechnology Materials and Devices Conference (NMDC) - Tainan, Taiwan (2013.10.6-2013.10.9)] 2013 IEEE 8th Nanotechnology Materials and Devices Conference (NMDC) - A novel selective growth of nanowire on CMOS MEMS compatible gas sensor
Lu, Jiong-Heng, Jeng, Chuen-Ren, Shen, Chih-Hsiung, Chen, Shu-JungYear:
2013
Language:
english
DOI:
10.1109/nmdc.2013.6707457
File:
PDF, 1.16 MB
english, 2013