Fluidized-bed atomic layer deposition reactor for the...

Review of Scientific Instruments 2014 / 01 Vol. 85; Iss. 1

Fluidized-bed atomic layer deposition reactor for the synthesis of core-shell nanoparticles

Didden, Arjen P., Middelkoop, Joost, Besling, Wim F. A., Nanu, Diana E., van de Krol, Roel
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Volume:
85
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4863099
Date:
January, 2014
File:
PDF, 814 KB
english, 2014
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