Metrology of non-thermal capacitively coupled N2–Ar mixture...

Optics Communications 2013 / 6 Vol. 296

Metrology of non-thermal capacitively coupled N2–Ar mixture plasma

Rehman, N.U., Anjum, Z., Masood, A., Farooq, M., Ahmad, I., Zakaullah, M.
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Volume:
296
Language:
english
Journal:
Optics Communications
DOI:
10.1016/j.optcom.2013.01.004
Date:
June, 2013
File:
PDF, 954 KB
english, 2013
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