Dynamic Response of an Electrostatically Actuated Micro-Beam in an Incompressible Viscous Fluid Cavity
Golzar, Farzin Ghahramanian, Shabani, Rasoul, Hatami, Hamed, Rezazadeh, GhaderVolume:
23
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2013.2291037
Date:
June, 2014
File:
PDF, 1.31 MB
english, 2014