Simple and efficient method to fabricate nano cone arrays...

Microelectronic Engineering 2012 / 10 Vol. 98

Simple and efficient method to fabricate nano cone arrays by FIB milling demonstrated on planar substrates and on protruded structures

Rommel, M., Bauer, A.J., Frey, L.
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Volume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.07.009
Date:
October, 2012
File:
PDF, 1.01 MB
english, 2012
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