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[IEEE 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Shenzhen, China (2009.01.5-2009.01.8)] 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Effect of pressure on the Q factor and the resonance frequency of SiN microcantilevers
Gavan, Khashayar Babaei, van der Heijden, Joost, van der Drift, Emile W. J. M., van der Zant, Herre S. J.Year:
2009
Language:
english
DOI:
10.1109/nems.2009.5068600
File:
PDF, 5.69 MB
english, 2009