Novel organic polymer for UV-enhanced substrate conformal...

Microelectronic Engineering 2012 / 10 Vol. 98

Novel organic polymer for UV-enhanced substrate conformal imprint lithography

Fader, R., Schmitt, H., Rommel, M., Bauer, A.J., Frey, L., Ji, R., Hornung, M., Brehm, M., Vogler, M.
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Volume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.07.010
Date:
October, 2012
File:
PDF, 704 KB
english, 2012
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