![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 7 April 2008)] Micro-Optics 2008 - Direct patterning of micro-optical structures by combined nanoimprinting and lithography
Tuominen, Jarkko, Hiltunen, Jussi, Wojdyla, Antoine, Karppinen, Mikko, Suutala, Antti, Jantunen, Heli, Bouffaron, Renaud, Escoubas, Ludovic, Thienpont, Hugo, Van Daele, Peter, Mohr, Jürgen, TaghizadehVolume:
6992
Year:
2008
Language:
english
DOI:
10.1117/12.781151
File:
PDF, 1.06 MB
english, 2008