Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2013 / 11 Vol. 315
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Energy dependence of non-Rutherford proton elastic scattering spectrum for hafnium nitride thin film
Gotoh, Yasuhito, Ohue, Wataru, Tsuji, HiroshiVolume:
315
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2013.05.082
Date:
November, 2013
File:
PDF, 415 KB
english, 2013