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Backside illumination processing technology for InGaAs/lnAlAs/lnP photofets and MSMs
Eric A. Martin, Kenneth Vaccaro, Stephen M. Spaziani, Joseph P. LorenzoVolume:
26
Year:
1995
Language:
english
Pages:
9
DOI:
10.1016/0026-2692(95)98951-m
File:
PDF, 682 KB
english, 1995