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Silicon MOSFETs on insulator with lithography-independent 100 nm channel length
V. Dudek, W. Appel, L. Beer, G. Digele, B. Höfflinger, H. SchneiderVolume:
27
Year:
1996
Language:
english
Pages:
8
DOI:
10.1016/0026-2692(96)00012-2
File:
PDF, 576 KB
english, 1996