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Reactively sputtered titanium resistors, capacitors and rectifiers for microcircuits
Kiyotaka Wasa, Shigeru HayakawaVolume:
6
Year:
1967
Language:
english
Pages:
9
DOI:
10.1016/0026-2714(67)90262-4
File:
PDF, 675 KB
english, 1967