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Stiction in surface micromachining
Tas, Niels, Sonnenberg, Tonny, Jansen, Henri, Legtenberg, Rob, Elwenspoek, MikoVolume:
6
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/6/4/005
Date:
December, 1996
File:
PDF, 592 KB
english, 1996