Robust MEMS Gyroscope Based on Thermal Principles

Robust MEMS Gyroscope Based on Thermal Principles

Bahari, Jamal, Feng, Rui, Leung, Albert M.
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Volume:
23
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2013.2262584
Date:
February, 2014
File:
PDF, 27.17 MB
english, 2014
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