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Interdiffusion studies of single crystal TiN/NbN superlattice thin films
Engström, C., Birch, J., Hultman, L., Lavoie, C., Cabral, C., Jordan-Sweet, J. L., Carlsson, J. R. A.Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581961
File:
PDF, 525 KB
english, 1999