High-performance micromachined gyroscope with a slanted...

Journal of Semiconductors 2009 / 04 Vol. 30; Iss. 4

High-performance micromachined gyroscope with a slanted suspension cantilever

Dingbang, Xiao, Xuezhong, Wu, Zhanqiang, Hou, Zhihua, Chen, Peitao, Dong, Shengyi, Li
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Volume:
30
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/30/4/044012
Date:
April, 2009
File:
PDF, 256 KB
english, 2009
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