Dynamic electro-thermal simulation of microsystems—a review

Dynamic electro-thermal simulation of microsystems—a review

Bechtold, Tamara, Rudnyi, Evgenii B, Korvink, Jan G
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Volume:
15
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/15/11/r01
Date:
November, 2005
File:
PDF, 969 KB
english, 2005
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