Dynamic electro-thermal simulation of microsystems—a review
Bechtold, Tamara, Rudnyi, Evgenii B, Korvink, Jan GVolume:
15
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/15/11/r01
Date:
November, 2005
File:
PDF, 969 KB
english, 2005