Room temperature DC magnetron sputtering deposition of...

Materials Letters 2013 / 09 Vol. 106

Room temperature DC magnetron sputtering deposition of hydrogenated aluminum doped zinc oxide thin films on polyethylene terephthalate substrates

Zhu, Ke, Yang, Ye, Wei, Tiefeng, Tan, Ruiqin, Cui, Ping, Song, Weijie, Choy, Kwang-Leong
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Volume:
106
Language:
english
Journal:
Materials Letters
DOI:
10.1016/j.matlet.2013.05.063
Date:
September, 2013
File:
PDF, 1.47 MB
english, 2013
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