Preferred orientation and piezoelectricity in sputtered ZnO...

Preferred orientation and piezoelectricity in sputtered ZnO films

Gardeniers, J. G. E., Rittersma, Z. M., Burger , G. J.

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Volume:

Year:

1998

Language:

english

DOI:

10.1063/1.367959

File:

PDF, 466 KB

english, 1998

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