Electron bounce resonance heating in dual-frequency...

Plasma Sources Science and Technology 2013 / 04 Vol. 22; Iss. 2

Electron bounce resonance heating in dual-frequency capacitively coupled oxygen discharges

Liu, Yong-Xin, Zhang, Quan-Zhi, Liu, Jia, Song, Yuan-Hong, Bogaerts, Annemie, Wang, You-Nian
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Volume:
22
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/22/2/025012
Date:
April, 2013
File:
PDF, 689 KB
english, 2013
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