Chemistry in long residence time fluorocarbon plasmas
Sant, S. P., Nelson, C. T., Overzet, L. J., Goeckner, M. J.Volume:
27
Year:
2009
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3065678
File:
PDF, 1.08 MB
english, 2009