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Conduction mechanisms in Ta[sub 2]O[sub 5]/SiO[sub 2] and Ta[sub 2]O[sub 5]/Si[sub 3]N[sub 4] stacked structures on Si
Chaneliere, C., Autran, J. L., Devine, R. A. B.Volume:
86
Year:
1999
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.370756
File:
PDF, 334 KB
english, 1999