Test particle simulation of the role of ballistic electrons...

Test particle simulation of the role of ballistic electrons in hybrid dc/rf capacitively coupled CF[sub 4] plasmas

Ventzek, P. L. G., Denpoh, K.
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Volume:
27
Year:
2009
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3072922
File:
PDF, 1.14 MB
english, 2009
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