Test particle simulation of the role of ballistic electrons in hybrid dc/rf capacitively coupled CF[sub 4] plasmas
Ventzek, P. L. G., Denpoh, K.Volume:
27
Year:
2009
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3072922
File:
PDF, 1.14 MB
english, 2009