Polymer self assembly in semiconductor microelectronics
C. T. Black, R. Ruiz, G. Breyta, J. Y. Cheng, M. E. Colburn, K. W. Guarini, H. Kim, Y. ZhangVolume:
51
Year:
2007
Language:
english
DOI:
10.1147/rd.515.0605
File:
PDF, 2.90 MB
english, 2007