Effects of target voltage during pulse-off period in pulsed magnetron sputtering on afterglow plasma and deposited film structure
Nakano, Takeo, Hirukawa, Norihiko, Saeki, Shuhei, Baba, ShigeruVolume:
87
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2012.03.010
Date:
January, 2013
File:
PDF, 571 KB
english, 2013