Feasibility study of photocathode electron projection...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 1995 / 11 Vol. 13; Iss. 6

Feasibility study of photocathode electron projection lithography

Saville, Gordon F.
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Volume:
13
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.588101
Date:
November, 1995
File:
PDF, 763 KB
english, 1995
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