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Double patterning in nanoimprint lithography
Okada, Makoto, Miyake, Hiroto, Iyoshi, Shuso, Yukawa, Takao, Katase, Tetsuya, Tone, Katsuhiko, Haruyama, Yuichi, Matsui, ShinjiVolume:
112
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.06.009
Date:
December, 2013
File:
PDF, 1.30 MB
english, 2013