Impact of Gd2O3 passivation layer on interfacial and...

Applied Surface Science 2014 / 2 Vol. 291

Impact of Gd2O3 passivation layer on interfacial and electrical properties of atomic-layer-deposited ZrO2 gate dielectric on GaAs

Gong, Youpin, Zhai, Haifa, Liu, Xiaojie, Kong, Jizhou, Wu, Di, Li, Aidong
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Volume:
291
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2013.09.021
Date:
February, 2014
File:
PDF, 1.42 MB
english, 2014
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